WebIn Situ Helium Ion Implantation. A low-energy ion source provides helium ions with an energy of 5-20 keV and a flux up to about 2x10 12 ions/cm 2 /s for helium implantation in situ.The helium beam merges with the NEC implanter ion beam before entering the microscope with an incident angle of 30° from the electron optical axis, permitting real … WebIon implantation is a doping method used in semiconductors that introduces impurities into a semiconductor wafer, enabling conductivity. This process offers advantages …
Patents Assigned to Applied Materials, Inc.
Web4 mei 2011 · AMAT’s $4.9B Acquisition of Varian for Ion Implant Tech Applied Materials (Nasdaq: AMAT) is making a big move -- the semiconductor equipment giant is acquiring Varian Semiconductor Equipment... Web8 sep. 1997 · We claim: 1. An ion implanter for implanting ions into a substrate comprising an ion beam generator for producing a beam of ions, a flight tube to transport said beam at a transport energy, a mass selection apparatus in the flight tube to select a desired mass of ions for transmission in the ion beam from the flight tube, a substrate holder for holding a … optical audio output from tv to home theater
New Applied Materials Technologies Help Leading Silicon …
WebIon implantation and its history A gas is ionized, and the ions are accelerated by a high electric field, and injected into the target wafer to hundreds of nm depth. Typical ion implantation parameters: Ion: P, As, Sb, B, In, O Dose: 1011 - 1018 cm-2 Ion energy: 1 - 400 ke. V Uniformity and reproducibility: ± 1% Temperature: room temperature ... Web30 okt. 2014 · Carbon dioxide (CO 2 ) is still widely used as the feed gas for carbon implantation. However, it is well known that the high concentration of oxygen from CO 2 … Web26 jun. 2014 · Improvements to the implanter architecture include more precise angle control, increased beam utilization, better uniformity and repeatability and longer maintenance intervals. Advanced ion optics allow measurement and control of beam shape. Published in: 2014 20th International Conference on Ion Implantation Technology (IIT) … porting cell phone number faq